Research on Flux-Controlled Hybrid Tuning Reluctance Actuator for High Precision Motion

Limitations of current high-precision actuator technologies

Current high-performance motion systems rely predominantly on electromagnetic (Lorentz-based) actuators, which generate force using current-driven magnetic fields. These inherently produce heat, magnetic disturbances, and vibrations, reducing positioning accuracy and stability. In applications such as semiconductor lithography and metrology, this leads to thermal drift and trade-offs between speed and precision. Mitigation strategies like cooling and compensation increase system complexity, cost, and energy use. As a result, existing actuator technologies fundamentally limit next-generation system performance.

Novel actuator concept based on piezo-tunable reluctance

This project develops FLUX-HTRA, a novel actuator combining reluctance-based actuation with reluctance tuning modules that can alter reluctance. Force is generated by the control of magnetic flux through controlled reluctance instead of current-driven coils. This enables low heat generation, high bandwidth, and minimal magnetic disturbance. The project integrates actuator design, flux sensing, and advanced nonlinear (reset-based) control into a unified system. Thereby accurate and stable flux control is achieved, enabling a breakthrough in contactless high-performance actuation.

Consortium and impact

The project is executed by TU Delft and Fluxthor. TU Delft contributes expertise in nonlinear control and modelling, while Fluxthor develops actuator hardware, sensing, and system integration. This co-design approach enables a unified high-performance system. FLUX-HTRA enables improved precision, reduced energy use, and lower material consumption in high-tech equipment. The project contributes to the innovation domains ‘Mechatronics & Optomechatronics’ within the National Technology Strategy.