Holland High Tech Holland High Tech
Q-INSPECT

Quantum INSitu Performance and Error Characterization Technology

Spin qubits in silicon-germanium heterostructures are among the most promising pathways to scalable, manufacturable quantum chips. Their performance is critically determined by the density and spatial distribution of interface trap charges at the SiGe/SiO₂ interface. These charges limit qubit fidelity and prevent reliable scaling of qubit arrays. No charaterisation tool exists for inspecting these interface charges non-invasively and at the mK temperatures at which spin qubits actually operate.

The solution

Q-INSPECT develops and validates Low-Temperature Kelvin Probe Force Microscopy (LT-KPFM) the first operando, nanoscale, millikelvin metrology platform for spin-qubit characterisation. By integrating KPFM mode into the Onnes Technologies cryogen-free dilution refrigerator platform and building on TNO’s established room-temperature KPFM methodology, the project closes the metrology gap in a single, validated instrument. Characterising Dᴵᵀ charges at cryogenic temperature is qualitatively more informative than room-temperature measurement: reduced carrier screening and the temperature-dependent Fermi level position reveal the “active” charge population experienced by an operating qubit that is invisible at room temperature.

The results

Q-INSPECT will deliver: (1) a validated LT-KPFM prototype, the world’s first milli-Kelvin KPFM instrument for quantum device characterisation; (2) a reproducible probe preparation and measurement protocol; (3) a validated Dᴵᵀ characterisation methodology; (4) a quantitative dataset comparing room-temperature and cryogenic Dᴵᵀ properties in SiGe spin-qubit structures; and (5) a follow-on agreement with Intel (or equivalent QPU manufacturer) to continue qubit metrology exploration.

Strategic relevance

Q-INSPECT strengthens the Dutch position in three innovation domains (Quantum Technologies, Semiconductor Technologies, Imaging Technologies), contributes directly to the KIA Quantum Technology and MMIP Quantum Delta NL roadmaps, and supports the Sleuteltechnologieën urgent transition. Onnes Technologies, as the only company globally developing mK-KPFM for quantum device metrology, is positioned to capture a strategically important niche in the growing quantum hardware market, projected to exceed USD 10 billion by 2030. The public-private partnership structure, Dutch high-tech SME with national research institute, exemplifies the collaboration model Holland High Tech is designed to support.

Facts & figures
  • Scheme: MKB Hightech
  • Programme: | -
  • Total budgeted project costs: € 788.785,00
  • Project start date: 1 October 2026
  • Project end date: 30 September 2028
Project managers
Project consortium
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