Hermetic packaging* of microfluidic sensor chips without glue or elastomers for ventilators and multi-infusion systems

Although MEMS-based flow sensors themselves are close to the required performance level, a significant challenge remains in connecting the sensor chip to external systems without using elastomeric seals or adhesives, which can pose unacceptable risks in these applications. In breathing systems, elastomers can release volatile substances (VOCs) in the breathing gas path that the patient inhales directly. With multi-infusion systems, unwanted interactions between the glue and the different medications (incompatibility) can occur, causing the glue to dissolve or the medication to become ineffective.

Addressing this packaging issue is critical as demand for advanced ventilators and multi-infusion systems increases, making the development of a viable "glueless" sealing method essential for the adoption of MEMS-based flowmeters in the medical market and beyond.