Semiconductor Equipment

Semiconductor Equipment

Innovation with respect to the production equipment of advanced integrated circuits: miniaturisation of components, enlargement of chips and substrates, and fabrication techniques.

Documents

Roadmap Semiconductor Equipment 2018-2021

Team

  • Joep Pijnenburg (ASML) (Chair)
  • Rogier Verberk (TNO)
  • Femke Tabak (NWO)

For more information, contact the roadmapteam