Semiconductor Equipment

Innovation with respect to the production equipment of advanced integrated circuits: miniaturisation of components, enlargement of chips and substrates, and fabrication techniques.

Documents

Roadmap Semiconductor Equipment 2018-2021

Team

• Joep Pijnenburg (ASML) (Chair)
• Rogier Verberk (TNO)
• André Verweij (BESI)
• Femke Tabak (NWO ENW)
• Mladen Skelin (NWO TTW)

For more information, contact the roadmapteam