Innovation with respect to the production equipment of advanced integrated circuits: miniaturisation of components, enlargement of chips and substrates, and fabrication techniques.
- Joep Pijnenburg (ASML) (Chair)
- Rogier Verberk (TNO)
- André Verweij (BESI)
- Femke Tabak (NWO ENW)
- Mladen Skelin (NWO TTW)
For more information, contact the roadmapteam