Semiconductor Equipment

Semiconductor Equipment

Innovation with respect to the production equipment of advanced integrated circuits: miniaturisation of components, enlargement of chips and substrates, and fabrication techniques.


Roadmap Semiconductor Manufacturing Equipment  2020-2023


  • Frans List (ASML) (Chair)
  • Rogier Verberk (TNO)
  • André Verweij (BESI)
  • Femke Tabak (NWO ENW)
  • Mladen Skelin (NWO TTW)

For more information, contact the roadmapteam