VASF
Vibro-Acoustic Substructuring Framework
Microchips are manufactured in lithography machines. The scale of the smallest features in these microchips are in the order of nanometers.
Hence, vibrations induced either externally or internally, largely affect the capability of the machine to achieve this accuracy. This project focusses on a strategy to simulate the vibro-acoustic response of lithography machines using sub-structures. In this strategy, a multiple of accurate, but not computationally expensive, vibro-acoustic models are coupled in a model for the complete system. The benefits of such a model are a necessary reduction of the complexity/calculation times, as simulating the entire machine is not feasible.