The uncharted B-EUV landscape: scouting for optimal ion mitigation

The science question

This project aims at gaining insight in relatively slow collisions between heavy-ions and light gaseous molecules, collisions in which potential energy dominates over kinetic energy, an unexplored collision regime. Will the excess of potential energy be released in the form of it photons or electrons and of which energy? Measuring the released energy will probe the interactions on the most fundamental quantum state level.

Implementation of the project:

The project will generate understanding and quantitative data on heavy-ion interactions in and around short wavelength (beyond-EUV), laser-driven light sources. The outcome of the TERRA-BEUV project is a set of boundary conditions for BEUV light sources, which will serve as critical input for future go/no-go decisions on the BEUV light source research for photolithography or spin off applications, such as in metrology and biological imaging.

Output of the project:

The project will generate understanding and quantitative data on heavy-ion interactions in and around short wavelength (beyond-EUV), laser-driven light sources. The outcome of the TERRA-BEUV project is a set of boundary conditions for BEUV light sources, which will serve as critical input for future go/no-go decisions on the BEUV light source research for photolithography or spin off applications, such as in metrology and biological imaging