MEMS-Based Projection Column for Multimodal Light-Electron Integrated SEM

Democratizing Atomic-Resolution Integrated Light-Electron Imaging

This project aims to develop a MEMS-based transmission electron projection column to be integrated into an standard SEM platform, unlocking advanced imaging modalities such as diffraction, low-energy STEM, and phase contrast within a compact and cost-effective design. By drastically reducing the complexity, cost, and footprint of electron optics, the technology “democratizes” high resolution multimodal light-electron inspection making it widely accessible. This breakthrough empowers researchers and industry to perform atomic-resolution imaging more efficiently, supporting cutting-edge research and applications in advanced optics and nano-photonics, nanotechnology, semiconductor diagnostics, and biomedical research.

Disruptive Innovation and Societal Impact

The project is carried out through a public-private partnership involving TU Delft, Delmic, and leading high-tech SMEs, combining expertise in electron optics, MEMS micro-fabrication, and system integration. Delmic, a world leader, plays a central role in ensuring application-driven development and commercialization. Together, we accelerate the translation of fundamental research into real-world solutions across strategic domains including advanced optics and nano-photonics, semiconductors, biomedical imaging, and environmental monitoring. By supporting critical technologies the project strengthens the Dutch high-tech ecosystem, aligns with national and European priorities, and drives sustainable innovation.