HDA
Holistic Design Automation for Semiconductor Manufacturing Equipment
The HDA project is a collaboration between ASML and Eindhoven University of Technology focusing on improving semiconductor manufacturing equipment and its development processes through advanced design automation. By integrating various engineering disciplines and leveraging AI, the project aims to enhance the efficiency, sustainability, and competitiveness of the Dutch semiconductor and manufacturing industry.
Expected Results
The project will develop new methods for automated design and diagnostics of semiconductor equipment. This includes creating tools for functional and structural design, performance optimization, and supervisory control. AI techniques will be used to improve system diagnostics, targeting a better understanding of legacy software, the architecture of the equipment, and its operation. The obtained knowledge and insights provide feedback for the development of new and improved systems, supporting system evolution. The project results will strengthen the technological leadership of Dutch academia and industry.