Advanced particle contamination control in high-tech systems

TKI “Advanced Particle Contamination Control in High-Tech Systems"

This TKI project aims to enhance contamination control in high-tech systems. The first goal is to compile an overview of the primary drivers of contamination in high-tech systems. This involves the complete chain of particle formation, release, transport, and deposition, along with the influence of process conditions and system dynamics.

The second goal is to identify and address gaps in the understanding of particle dynamics. Despite progress in technologies, knowledge gaps remain in particle dynamics and/or system interaction, hindering effective particle contamination control.

The third focus is on exploring how low-pressure crossflow configurations affect particle trajectories and evaluating the influence of an electrostatically biased sample plate on these paths. The existing Particle Test Rig will be upgraded to an Electrostatic Crossflow Duct configuration. This unique setup will facilitate advanced testing and visualization of particle behaviour in a crossflow, as well as the impact of electrostatic forces on this behaviour. These initiatives aim to develop effective strategies to enhance the reliability, performance, and lifespan of high-tech systems.